Additional Campus Affiliations
Professor Emeritus, Nuclear, Plasma, and Radiological Engineering
Research Professor, Materials Research Lab
Professor Emeritus, Center for Global Studies
Recent Publications
Canova, K. L., Souqui, L., Girolami, G. S., & Abelson, J. R. (2023). Using metal precursors to passivate oxides for area selective deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(3), [033407]. https://doi.org/10.1116/6.0002413
Lafollette, D. K., Canova, K. L., Zhang, Z. V., & Abelson, J. R. (2022). Coalescence of ultrathin films by atomic layer deposition or chemical vapor deposition: Models of the minimum thickness based on nucleation and growth rates. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 40(2), [023403]. https://doi.org/10.1116/6.0001562
Canova, K. L., Zhang, Z. V., Girolami, G. S., & Abelson, J. R. (2021). Superconformal growth and trench filling using a consumable inhibitor in chemical vapor deposition of Hf1-xVxBy. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 39(1), [013402]. https://doi.org/10.1116/6.0000640
Yang, Y., Canova, K. L., Jayaraman, S., Kim, D. Y., Girolami, G. S., & Abelson, J. R. (2021). Superconformal chemical vapor deposition using plasma-generated atomic species as a consumable growth inhibitor. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 39(4), [043409]. https://doi.org/10.1116/6.0001018
Zhang, Z. V., Girolami, G. S., & Abelson, J. R. (2021). Infrared reflection spectroscopy of adsorbed intermediates in real time during chemical vapor deposition of oxides. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 39(6), [063221]. https://doi.org/10.1116/6.0001328